Kavli Affiliate: Austin J. Minnich | First 5 Authors: Azmain A. Hossain, Sela Murphy, David S. Catherall, Anthony J. Ardizzi, Austin J. Minnich | Summary: Niobium nitride (NbN) is a metallic superconductor that is widely used for superconducting electronics due to its high transition temperature ($T_c$) and kinetic inductance. Processing-induced damage negatively affects the performance […]
Continue.. Atomic layer etching of niobium nitride using sequential exposures of O$_2$ and H$_2$/SF$_6$ plasmas