Kavli Affiliate: Clarence Chang | First 5 Authors: Juliang Li, Juliang Li, , , | Summary: Superconducting thin films with high intrinsic kinetic inductance $L_k$ are important for high-sensitivity detectors, enabling strong coupling in hybrid quantum systems, and enhancing nonlinearities in quantum devices. We report the room-temperature reactive sputtering of titanium nitride thin films with […]
Continue.. Room temperature reactive sputtering deposition of titanium nitride with high sheet kinetic inductance