Kavli Affiliate: Austin Minnich | First 5 Authors: David Catherall, Azmain Hossain, Austin Minnich, , | Summary: On-chip photonic devices based on SiO$_2$ are of interest for applications such as microresonator gyroscopes and microwave sources. Although SiO$_2$ microdisk resonators have achieved quality factors exceeding one billion, this value remains an order of magnitude less than […]
Continue.. Atomic layer etching of SiO$_2$ using sequential exposures of Al(CH$_3$)$_3$ and H$_2$/SF$_6$ plasma