Kavli Affiliate: Oskar Painter | First 5 Authors: Neha Mahuli, Neha Mahuli, , , | Summary: We present a dry surface treatment combining atomic layer etching and deposition (ALE and ALD) to mitigate dielectric loss in fully fabricated superconducting quantum devices formed from aluminum thin films on silicon. The treatment, performed as a final processing […]
Continue.. Improving the lifetime of aluminum-based superconducting qubits through atomic layer etching and deposition