Kavli Affiliate: Oskar Painter | Summary:We present a dry surface treatment combining atomic layer etching and deposition (ALE and ALD) to mitigate dielectric loss in fully fabricated superconducting quantum devices formed from aluminum thin films on silicon. The treatment, performed as a final processing step prior to device packaging, starts by conformally removing the native […]
Continue.. Improving the lifetime of aluminum-based superconducting qubits through atomic layer etching and deposition