Kavli Affiliate: David Muller| First 5 Authors: Danqing Wang, Danqing Wang, , , | Summary:The development of large-scale quantum processors benefits from superconducting qubits that can operate at elevated temperatures and be fabricated with scalable, foundry-compatible processes. Atomic layer deposition (ALD) is increasingly being adopted as an industrial standard for thin-film growth, particularly in applications […]
Continue.. All-nitride superconducting qubits based on atomic layer deposition