Kavli Affiliate: Michael L. Roukes | First 5 Authors: Andrew N. Cleland, Michael L. Roukes, , , | Summary: We describe a method with which to fabricate sub-micron mechanical structures from silicon-on-insulator substrates. We believe this is the first reported method for such fabrication, and our technique allows for complex, multilayer electron beam lithography to […]
Continue.. Nanoscale Mechanical Structures Fabricated from Silicon-on-Insulator Substrates