Platinum Black for stray-light mitigation on high-aspect-ratio micromechanical cantilever

Kavli Affiliate: Giorgio Gratta

| First 5 Authors: Gautam Venugopalan, Giorgio Gratta, , ,

| Summary:

Microscopic devices are widely used in optomechanical experiments at the
cutting-edge of precision experimental physics. Such devices often need to have
high electrical conductivity but low reflectivity at optical wavelengths, which
can be competing requirements for many commonly available coatings. In this
manuscript, we present a technique to electroplate platinum with a highly
convoluted surface on a $475,mathrm{mu m } , times 500,mathrm{mu m } ,
times 10,mathrm{mu m }$ Silicon/Gold cantilever, preserving its electrical
conductivity but reducing its reflectivity in the $0.3 – 1,mathrm{mu m}$
range by a factor of $100$ or greater. The fact that the deposition can be done
post-fabrication without damaging delicate structures makes this technique of
interest to a potentially large range of experimental applications.

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