Kavli Affiliate: Irfan Siddiqi
| First 5 Authors: Christian Jünger, Trevor Chistolini, Long B. Nguyen, Hyunseong Kim, Larry Chen
| Summary:
Superinductors have become a crucial component in the superconducting circuit
toolbox, playing a key role in the development of more robust qubits. Enhancing
the performance of these devices can be achieved by suspending the
superinductors from the substrate, thereby reducing stray capacitance. Here, we
present a fabrication framework for constructing superconducting circuits with
suspended superinductors in planar architectures. To validate the effectiveness
of this process, we systematically characterize both resonators and qubits with
suspended arrays of Josephson junctions, ultimately confirming the high quality
of the superinductive elements. In addition, this process is broadly compatible
with other types of superinductors and circuit designs. Our results not only
pave the way for scalable novel superconducting architectures but also provide
the primitive for future investigation of loss mechanisms associated with the
device substrate.
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