Kavli Affiliate: Darrell G. Schlom | First 5 Authors: Cameron A. Gorsak, Henry J. Bowman, Katie R. Gann, Joshua T. Buontempo, Kathleen T. Smith | Summary: In this study, we investigate in situ etching of b{eta}-Ga2O3 in a metal-organic chemical vapor deposition (MOCVD) system using tert-Butyl chloride (TBCl). We report the successful etching of both […]
Continue.. In situ etching of b{eta}-Ga2O3 using tert-butyl chloride in an MOCVD system