Kavli Affiliate: Feng Wang
| First 5 Authors: Jun-Yi Shan, Nathaniel Morrison, Su-Di Chen, Feng Wang, Eric Y. Ma
| Summary:
Microwave impedance microscopy (MIM) is an emerging scanning probe technique
for nanoscale complex permittivity mapping and has made significant impacts in
diverse fields from semiconductors to quantum materials. To date, the most
significant hurdles that limit its widespread use are the requirements of
specialized microwave probes and high-precision cancellation circuits. Here we
show that forgoing both elements not only is feasible but actually enhances MIM
performance. Using monolithic silicon cantilever probes and a cancellation-free
architecture, we demonstrate thermal Johnson-noise-limited, drift-free MIM
operation with 15 nm spatial resolution, minimal topography crosstalk, and an
unprecedented sensitivity of 0.26 zF/$sqrt{text{Hz}}$. We accomplish this by
taking advantage of the high mechanical resonant frequency and spatial
resolution of silicon probes, the inherent common-mode phase noise rejection of
self-referenced homodyne detection, and the exceptional stability of the
streamlined architecture. Our approach makes MIM drastically more accessible
and paves the way for more advanced operation modes and integration with
complementary techniques.
| Search Query: ArXiv Query: search_query=au:”Feng Wang”&id_list=&start=0&max_results=3