Kavli Affiliate: P. G. Steeneken
| First 5 Authors: M. P. F. Wopereis, N. Bouman, S. Dutta, P. G. Steeneken, F. Alijani
| Summary:
Resonators based on two-dimensional (2D) materials have exceptional
properties for application as nanomechanical sensors, which allows them to
operate at high frequencies with high sensitivity. However, their performance
as nanomechanical sensors is currently limited by their low quality
($Q$)-factor. Here, we make use of micro-electromechanical systems (MEMS) to
apply pure in-plane mechanical strain, enhancing both their resonance frequency
and Q-factor. In contrast to earlier work, the 2D material resonators are
fabricated on the MEMS actuators without any wet processing steps, using a
dry-transfer method. A platinum clamp, that is deposited by electron
beam-induced deposition, is shown to be effective in fixing the 2D membrane to
the MEMS and preventing slippage. By in-plane straining the membranes in a
purely mechanical fashion, we increase the tensile energy, thereby diluting
dissipation. This way, we show how dissipation dilution can increase the
$Q$-factor of 2D material resonators by 91%. The presented MEMS actuated
dissipation dilution method does not only pave the way towards higher
$Q$-factors in resonators based on 2D materials, but also provides a route
toward studies of the intrinsic loss mechanisms of 2D materials in the
monolayer limit.
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