Imaging 3D Chemistry at 1 nm Resolution with Fused Multi-Modal Electron Tomography

Kavli Affiliate: Ting Xu

| First 5 Authors: Jonathan Schwartz, Zichao Wendy Di, Yi Jiang, Jason Manassa, Jacob Pietryga

| Summary:

Measuring the three-dimensional (3D) distribution of chemistry in nanoscale
matter is a longstanding challenge for metrological science. The inelastic
scattering events required for 3D chemical imaging are too rare, requiring high
beam exposure that destroys the specimen before an experiment completes. Even
larger doses are required to achieve high resolution. Thus, chemical mapping in
3D has been unachievable except at lower resolution with the most
radiation-hard materials. Here, high-resolution 3D chemical imaging is achieved
near or below one nanometer resolution in a Au-Fe$_3$O$_4$ metamaterial,
Co$_3$O$_4$ – Mn$_3$O$_4$ core-shell nanocrystals, and
ZnS-Cu$_{0.64}$S$_{0.36}$ nanomaterial using fused multi-modal electron
tomography. Multi-modal data fusion enables high-resolution chemical tomography
often with 99% less dose by linking information encoded within both elastic
(HAADF) and inelastic (EDX / EELS) signals. Now sub-nanometer 3D resolution of
chemistry is measurable for a broad class of geometrically and compositionally
complex materials.

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