Surface acoustic wave resonators on thin film piezoelectric substrates in the quantum regime

Kavli Affiliate: Simon Groblacher

| First 5 Authors: Thomas Luschmann, Alexander Jung, Stephan Geprägs, Franz X. Haslbeck, Achim Marx

| Summary:

Lithium niobate (LNO) is a well established material for surface acoustic
wave (SAW) devices including resonators, delay lines and filters. Recently,
multi-layer substrates based on LNO thin films have become commercially
available. Here, we present a systematic low-temperature study of the
performance of SAW devices fabricated on LNO-on-insulator and LNO-on-Silicon
substrates and compare them to bulk LNO devices. Our study aims at assessing
the performance of these substrates for quantum acoustics, i.e. the integration
with superconducting circuits operating in the quantum regime. To this end, we
design SAW resonators with a target frequency of 5 GHz and perform experiments
at millikelvin temperatures and microwave power levels corresponding to single
photons or phonons. The devices are investigated regarding their internal
quality factors as a function of the excitation power and temperature, which
allows us to characterize and quantify losses and identify the dominating loss
mechanism. For the measured devices, fitting the experimental data shows that
the quality factors are limited by the coupling of the resonator to a bath of
two-level-systems. Our results suggest that SAW devices on thin film LNO on
silicon have comparable performance to devices on bulk LNO and are viable for
use in SAW-based quantum acoustic devices.

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