Kavli Affiliate: Irfan Siddiqi
| First 5 Authors: Trevor Chistolini, Kyunghoon Lee, Archan Banerjee, Mohammed Alghadeer, Christian Jünger
| Summary:
Suspending devices on thin SiN membranes can limit their interaction with the
bulk substrate and reduce parasitic capacitance to ground. While suspending
devices on membranes is used in many fields including radiation detection using
superconducting circuits, there has been less investigation into maximum
membrane aspect ratios and achievable suspended device quality, metrics
important to establish the applicable scope of the technique. Here, we
investigate these metrics by fabricating superconducting coplanar waveguide
resonators entirely atop thin ($sim$110 nm) SiN membranes, where the
membrane’s shortest length to thickness yields an aspect ratio of approximately
$7.4 times 10^3$. We compare these membrane resonators to on-substrate
resonators on the same chip, finding similar internal quality factors
$sim$$10^5$ at single photon levels. Furthermore, we confirm that these
membranes do not adversely affect resonator thermalization and conduct further
materials characterization. By achieving high quality superconducting circuit
devices fully suspended on thin SiN membranes, our results help expand the
technique’s scope to potential uses including incorporating higher aspect ratio
membranes for device suspension and creating larger footprint, high impedance,
and high quality devices.
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