Kavli Affiliate: Ali Javey
| First 5 Authors: Geun Ho Ahn, Alexander D. White, Hyungjin Kim, Naoki Higashitarumizu, Felix M. Mayor
| Summary:
Many attractive photonics platforms still lack integrated photodetectors due
to inherent material incompatibilities and lack of process scalability,
preventing their widespread deployment. Here we address the problem of scalably
integrating photodetectors in a photonic platform-independent manner. Using a
thermal evaporation and deposition technique developed for nanoelectronics, we
show that tellurium (Te), a quasi-2D semi-conductive element, can be evaporated
at low temperature directly onto photonic chips to form air-stable,
high-responsivity, high-speed, ultrawide-band photodetectors. We demonstrate
detection at visible, telecom, and mid-infrared wavelengths, a bandwidth of
more than 40 GHz, and platform-independent scalable integration with photonic
structures in silicon, silicon nitride and lithium niobate.
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