Kavli Affiliate: Clarence Chang
| First 5 Authors: Juliang Li, Juliang Li, , ,
| Summary:
Superconducting thin films with high intrinsic kinetic inductance $L_k$ are
important for high-sensitivity detectors, enabling strong coupling in hybrid
quantum systems, and enhancing nonlinearities in quantum devices. We report the
room-temperature reactive sputtering of titanium nitride thin films with a
critical temperature $T_c$ of SI3.8K and a thickness of SI27nm.
Fabricated into resonators, these films exhibit a sheet kinetic inductance
$L_k, square$ of 394~$textrmpH/square$, as inferred from resonant
frequency measurements. %from this film and measure quality factors of $4times
10^4$; these quality factors are likely limited by the low resistivity wafer.
X-ray diffraction analysis confirms the formation of stoichiometric TiN, with
no residual unreacted titanium. The films also demonstrate a characteristic
sheet resistivity of 475~$Omega/square$, yielding an impedance an order of
magnitude higher than conventional 50~$Omega$ resonators. This property could
enhance microwave singletextendash photon coupling strength by an order of
magnitude, offering transformative potential for hybrid quantum systems and
quantum sensing. Furthermore, the high $L_k$ enables Kerr nonlinearities
comparable to statetextendash oftextendash thetextendash art quantum
devices. Combined with its relatively high $T_c$, this thin film presents a
promising platform for superconducting devices, including amplifiers and qubits
operating at higher temperatures.
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