Kavli Affiliate: Michael L. Roukes
| First 5 Authors: Andrew N. Cleland, Michael L. Roukes, , ,
| Summary:
We describe a method with which to fabricate sub-micron mechanical structures
from silicon-on-insulator substrates. We believe this is the first reported
method for such fabrication, and our technique allows for complex, multilayer
electron beam lithography to define metallized layers and structural Si layers
on these substrates. The insulating underlayer may be removed by a
straightforward wet processing step, leaving suspended single crystal Si
mechanical structures. We have fabricated and mechanically tested structures
such as beam resonators, tuning-fork resonators, and torsional oscillators, all
with smallest dimensions of 0.1-0.2 microns and fundamental resonance
frequencies above 10 MHz.
| Search Query: ArXiv Query: search_query=au:”Michael L. Roukes”&id_list=&start=0&max_results=3