Kavli Affiliate: P. G. Steeneken
| First 5 Authors: M. P. F. Wopereis, N. Bouman, S. Dutta, P. G. Steeneken, F. Alijani
| Summary:
Resonators based on two-dimensional (2D) materials have exceptional
properties for application as nanomechanical sensors, which could allow them to
operate at high frequencies with high sensitivity. However, the performance of
2D material resonators as nanomechanical sensors is currently limited by their
high dissipation rate, resulting in low quality ($Q$)-factors. Here, we make
use of micro-electromechanical systems (MEMS) to strain 2D material resonators
in situ, enhancing both their resonance frequencies and Q-factors. We
dry-transfer 2D materials on the MEMS actuators and use electron beam-induced
deposition of platinum to clamp them, thus effectively ruling out slippage at
the boundaries. By in-plane straining the membranes in a purely mechanical
fashion, we then increase the tensile energy, thereby diluting dissipation.
Using our method, we can increase the $Q$-factor of 2D material resonators by
91%, paving the way towards raising the $Q$-factor in resonators based on 2D
materials.
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