Three-dimensional imaging of buried interfaces with multislice ptychography

Kavli Affiliate: Alex Zettl

| First 5 Authors: Colum M. O’Leary, Jianhua Zhang, Cong Su, Salman Kahn, Huaidong Jiang

| Summary:

We demonstrate the application of multislice ptychography to a twisted
hexagonal boron nitride (h-BN) heterointerface from a single-view data set. The
propagation from the top flake, through the interface, to the bottom flake is
visualized from separate slices of the reconstruction. The depth resolution of
the reconstruction is determined to be 2.74 nm, which is a significant
improvement over the aperture-limited depth resolution of 6.74 nm. This is
attributed to the diffraction signal extending beyond the aperture edge with
the depth resolution set by the curvature of the Ewald sphere. Future advances
to this approach could improve the depth resolution to the sub-nanometer level
and enable the identification of individual dopants, defects and color centers
in twisted heterointerfaces and other materials.

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