Kavli Affiliate: Ali Hajimiri
| First 5 Authors: Antonio Victor Machado de Oliveira, Antonio Victor Machado de Oliveira, , ,
| Summary:
Electrical impedance tomography with fully integrated microfluidics and
electronics is presented for the first time in a CMOS chip. Chambers and
electrodes are fabricated in the interconnect layers of a 65 nm CMOS chip
through post-processing, enabling picoliter-volumes to be processed and imaged.
Tomography maps are reconstructed by reading out voltages from a 16-element
electrode array and processing the data off-chip, and sources of variation in
reconstruction are discussed. The EIT system presented in this work serves as a
proof-of-concept towards using CMOS as a platform for co-integrated
microfluidics and electronics.
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