Kavli Affiliate: Ronald Hanson
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| Summary:
Micrometer-scale thin diamond devices are key components for various quantum
sensing and networking experiments, including the integration of color centers
into optical microcavities. In this work, we introduce a laser-cutting method
for patterning microdevices from millimeter-sized diamond membranes. The method
can be used to fabricate devices with micrometer thicknesses and edge lengths
of typically 10 $mu m$ to 100 $mu m$. We compare this method with an
established nanofabrication process based on electron-beam lithography, a
two-step transfer pattern utilizing a silicon nitride hard mask material, and
reactive ion etching. Microdevices fabricated using both methods are bonded to
a cavity Bragg mirror and characterized using scanning cavity microscopy. We
record two-dimensional cavity finesse maps over the devices, revealing insights
about the variation in diamond thickness, surface quality, and strain. The
scans demonstrate that devices fabricated by laser-cutting exhibit similar
properties to devices obtained by the conventional method. Finally, we show
that the devices host optically coherent Tin- and Nitrogen-Vacancy centers
suitable for applications in quantum networking.
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