Kavli Affiliate: Gregory D. Fuchs | Summary:Magnetic impurities are known to degrade superconductivity. For this reason, physical vapor deposition chambers that have previously been used for magnetic materials have generally been avoided for making high-quality superconducting resonator devices. In this article, we show by example that such chambers can be used for this purpose; with […]
Continue.. Low-loss Nb on Si superconducting resonators from a dual-use spintronics deposition chamber and with acid-free post-processing