Kavli Affiliate: Gregory D. Fuchs
| First 5 Authors: Maciej W. Olszewski, Jadrien T. Paustian, Tathagata Banerjee, Haoran Lu, Jorge L. Ramirez
| Summary:
Magnetic impurities are known to degrade superconductivity. For this reason,
physical vapor deposition chambers that have previously been used for magnetic
materials have generally been avoided for making high-quality superconducting
resonator devices. In this article, we show by example that such chambers can
be used: with Nb films sputtered in a chamber that continues to be used for
magnetic materials, we demonstrate compact (3 {mu}m gap) coplanar waveguide
resonators with low-power internal quality factors near one million. We achieve
this using a resist strip bath with no post-fabrication acid treatment, which
results in performance comparable to previous strip baths with acid treatments.
We also find evidence that this improved resist strip bath provides a better
surface chemical template for post-fabrication hydrogen fluoride processing.
These results are consistent across three Si substrate preparation methods,
including a SI{700}{celsius} anneal.
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