BLAST: A Wafer-scale Transfer Process for Heterogeneous Integration of Optics and Electronics

Kavli Affiliate: Paul L. McEuen | First 5 Authors: Yanxin Ji, Alejandro J. Cortese, Conrad L. Smart, Alyosha C. Molnar, Paul L. McEuen | Summary: We present a general transfer method for the heterogeneous integration of different photonic and electronic materials systems and devices onto a single substrate. Called BLAST, for Bond, Lift, Align, and […]


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