Kavli Affiliate: Xian Chen | First 5 Authors: Ka Hung Chan, Shengwang Du, Xian Chen, , | Summary: We theorize the surface step characterization by reflected incoherent-light differential interference microscopy with consideration of the optical diffraction effect. With the integration of localization analysis, we develop a quantitative differential interference optical system, by which we demonstrate […]
Continue.. Subnanometer Accuracy of Surface Characterization by Reflected-Light Differential Interference Microscopy