Kavli Affiliate: P. G. Steeneken | First 5 Authors: P. G. Steeneken, J. J. M. Ruigrok, S. Kang, J. T. M. van Beek, J. Bontemps | Summary: In this paper it is shown how the equivalent circuit parameters of a MEMS resonator can be simply obtained from an eigenfrequency simulation. Additionally, it is demonstrated that […]
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