Kavli Affiliate: Herre S. J. Van Der Zant
| First 5 Authors: Martin Lee, Martin Robin, Ruben Guis, Ulderico Filippozzi, Dong Hoon Shin
| Summary:
Although 2D materials hold great potential for next-generation pressure
sensors, recent studies revealed that gases permeate along the membrane-surface
interface that is only weakly bound by van der Waals interactions,
necessitating additional sealing procedures. In this work, we demonstrate the
use of free-standing complex oxides as self-sealing membranes that allow the
reference cavity of pressure sensors to be sealed by a simple anneal. To test
the hermeticity, we study the gas permeation time constants in nano-mechanical
resonators made from SrRuO3 and SrTiO3 membranes suspended over SiO2/Si
cavities which show an improvement up to 4 orders of magnitude in the
permeation time constant after annealing the devices for 15 minutes. Similar
devices fabricated on Si3N4/Si do not show such improvements, suggesting that
the adhesion increase over SiO2 is mediated by oxygen bonds that are formed at
the SiO2/complex oxide interface during the self-sealing anneal. We confirm the
enhancement of adhesion by picosecond ultrasonics measurements which show an
increase in the interfacial stiffness by 70% after annealing. Since it is
straigthforward to apply, the presented self-sealing method is thus a promising
route toward realizing ultrathin hermetic pressure sensors.
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